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[[abstract]]Since the carbon nanotube (CNT) arrays are widely used in field emission displays as electron sources, it is more and more important to grow high density and regularly arranged CNT arrays. In this study, we hope to control the structure of the porous silicon (PS) template so that we may control the CNT arrays structures. The current density, HF solution concentration and time are the parameters that affect the PS structure, which was prepared by electrochemical method. We changed different experimental parameters to find the optimal process conditions, and used SEM, four-point probe to analyze PS structures, and also, we grew the CNT arrays on the PS template. The SEM pictures showed that the depth of PS increased with time, HF solution concentration, and current density. Increasing the current density caused the pore densi...
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